Abstract: While III-V photovoltaics are among the most efficient, they suffer from a high manufacturing cost. One of the methods of reducing this cost is through GaAs substrate reuse, with a promising ...
Abstract: The capability of hydrogenated water to clean EUV blank substrates was examined. The hydrogenated water cleaning process was compared with an H2O2/NH4OH/H2O mixture (SC1) and ozonated water ...
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